Handbook of Semiconductor Silicon Technology by William C. O’Mara, Robert B. Herring, Lee P. Hunt
Noyes Publications | August 1, 1990 | Pages: 795 pages | ISBN: 0815512376 | 31.9MB | PDF
This is a comprehensive, up-to-date summary of the science, technology and manufacturing of semiconductor silicon materials by 10 experts in the field. Practical aspects such as materials handling, safety, and impurity and defect reduction are discussed; and a complete set of silicon based binary phase diagrams is included.

